Ultra-fast and sensitive silicon nanobelt field-effect transistor for high-throughput screening of alpha-fetoprotein

Yankuba B. Manga, Fu Hsiang Ko, Yuh Shyong Yang, Jia Yang Hung, Wen Luh Yang, Haw Ming Huang, Chi Chang Wu

研究成果: 雜誌貢獻文章同行評審

11 引文 斯高帕斯(Scopus)


In this paper, we described a novel fabrication technique for Silicon nanobelt field-effect transistors (SiNB FETs) based on the Local Oxidation of Silicon (LOCOS) process widely utilized in the manufacturing of microelectronics components and explore it to screened alpha-fetoprotein (AFP). LOCOS process is used as it enables thorough compatibility with complementary metal oxide semiconductor (CMOS) technology. Thus, the need for expensive lithography tools to define the nanoscale pattern is avoided. The SiNB FETs emerges as a powerful biosensor for ultrasensitive, label-free for biological/chemical detection and direct electrical readout. The analytical sensing results of the fabricated SiNB FETs employed as a biomolecular sensor for the early, real-time, and label-free screening of AFP can be understood in term of the change in charge density at the silicon nanobelt surface after functionalization. It is observed that, by tuning the gate voltage, the electrical linearity response of the system towards AFP extends its concentration range from 3. ng/mL to 100. ng/mL, allowing the screening of hepatocellular carcinoma (HCC). These results indicate that the detection of AFP under our direct, label-free, and ultrasensitive biosensor in a microfluidic channel could be one of the promising state-of-the-art techniques applicable as an AFP detector in real samples.
頁(從 - 到)1114-1121
期刊Sensors and Actuators, B: Chemical
出版狀態已發佈 - 3月 2018

ASJC Scopus subject areas

  • 電子、光磁材料
  • 儀器
  • 凝聚態物理學
  • 表面、塗料和薄膜
  • 金屬和合金
  • 電氣與電子工程
  • 材料化學


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