Sub-fM DNA sensitivity by self-aligned maskless thin-film transistor-based SoC bioelectronics

Min Cheng Chen; Chang Hsien Lin; Chia Yi Lin; Fu Kuo Hsueh; Wen Hsien Huang; Yu Chung Lien; Hsiu Chih Chen; Hsiao Ting Hsueh; Che Wei Huang; Chih Ting Lin; Yin Chih Liu; Ta Hsien Lee; Mu Yi Hua; Jian Tai Qiu; Mao Chen Liu; Yao Jen Lee; Jia Min Shieh; Chia Hua Ho; Chenming Hu; Fu Liang Yang

doi:10.1109/VLSIT.2012.6242494

Sub-fM DNA sensitivity by self-aligned maskless thin-film transistor-based SoC bioelectronics

Min Cheng Chen, Chang Hsien Lin, Chia Yi Lin, Fu Kuo Hsueh, Wen Hsien Huang, Yu Chung Lien, Hsiu Chih Chen, Hsiao Ting Hsueh, Che Wei Huang, Chih Ting Lin, Yin Chih Liu, Ta Hsien Lee, Mu Yi Hua, Jian Tai Qiu, Mao Chen Liu, Yao Jen Lee, Jia Min Shieh, Chia Hua Ho, Chenming Hu, Fu Liang Yang

研究成果: 書貢獻/報告類型 › 會議貢獻

1 引文斯高帕斯（Scopus）

摘要

This is the first study to successfully achieve record DNA sensitivity (sub-fM) by self-aligned, maskless, dual-channel, and metal-gate-based thin-film transistor nano-wire FET. Both novel device architecture (dual-channel) and optimization of integration processes (microcrystalline silicon and self-aligned sidewall sub-50 nm critical dimension) of nano-wire FET enhance the sensitivity to biological entities substantially. Meanwhile, the proposed device is accomplished with an embedded VLSI CMOS circuit. It can thus offer high application potential to pH, protein, and DNA probing in SoC-based portable bioelectronics.

原文	英語
主出版物標題	2012 Symposium on VLSI Technology, VLSIT 2012 - Digest of Technical Papers
頁面	127-128
頁數	2
DOIs	https://doi.org/10.1109/VLSIT.2012.6242494
出版狀態	已發佈 - 2012
對外發佈	是
事件	2012 Symposium on VLSI Technology, VLSIT 2012 - Honolulu, HI, 美國持續時間: 6月 12 2012 → 6月 14 2012

出版系列

名字	Digest of Technical Papers - Symposium on VLSI Technology
ISSN（列印）	0743-1562

會議

會議	2012 Symposium on VLSI Technology, VLSIT 2012
國家/地區	美國
城市	Honolulu, HI
期間	6/12/12 → 6/14/12

ASJC Scopus subject areas

電氣與電子工程

存取文件

10.1109/VLSIT.2012.6242494

其它文件與鏈接

Link to publication in Scopus

引用此

Chen, M. C., Lin, C. H., Lin, C. Y., Hsueh, F. K., Huang, W. H., Lien, Y. C., Chen, H. C., Hsueh, H. T., Huang, C. W., Lin, C. T., Liu, Y. C., Lee, T. H., Hua, M. Y., Qiu, J. T., Liu, M. C., Lee, Y. J., Shieh, J. M., Ho, C. H., Hu, C., & Yang, F. L. (2012). Sub-fM DNA sensitivity by self-aligned maskless thin-film transistor-based SoC bioelectronics. 於 2012 Symposium on VLSI Technology, VLSIT 2012 - Digest of Technical Papers (頁 127-128). 文章 6242494 (Digest of Technical Papers - Symposium on VLSI Technology). https://doi.org/10.1109/VLSIT.2012.6242494

Chen, MC, Lin, CH, Lin, CY, Hsueh, FK, Huang, WH, Lien, YC, Chen, HC, Hsueh, HT, Huang, CW, Lin, CT, Liu, YC, Lee, TH, Hua, MY, Qiu, JT, Liu, MC, Lee, YJ, Shieh, JM, Ho, CH, Hu, C & Yang, FL 2012, Sub-fM DNA sensitivity by self-aligned maskless thin-film transistor-based SoC bioelectronics. 於 2012 Symposium on VLSI Technology, VLSIT 2012 - Digest of Technical Papers., 6242494, Digest of Technical Papers - Symposium on VLSI Technology, 頁 127-128, 2012 Symposium on VLSI Technology, VLSIT 2012, Honolulu, HI, 美國, 6/12/12. https://doi.org/10.1109/VLSIT.2012.6242494

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abstract = "This is the first study to successfully achieve record DNA sensitivity (sub-fM) by self-aligned, maskless, dual-channel, and metal-gate-based thin-film transistor nano-wire FET. Both novel device architecture (dual-channel) and optimization of integration processes (microcrystalline silicon and self-aligned sidewall sub-50 nm critical dimension) of nano-wire FET enhance the sensitivity to biological entities substantially. Meanwhile, the proposed device is accomplished with an embedded VLSI CMOS circuit. It can thus offer high application potential to pH, protein, and DNA probing in SoC-based portable bioelectronics.",

author = "Chen, {Min Cheng} and Lin, {Chang Hsien} and Lin, {Chia Yi} and Hsueh, {Fu Kuo} and Huang, {Wen Hsien} and Lien, {Yu Chung} and Chen, {Hsiu Chih} and Hsueh, {Hsiao Ting} and Huang, {Che Wei} and Lin, {Chih Ting} and Liu, {Yin Chih} and Lee, {Ta Hsien} and Hua, {Mu Yi} and Qiu, {Jian Tai} and Liu, {Mao Chen} and Lee, {Yao Jen} and Shieh, {Jia Min} and Ho, {Chia Hua} and Chenming Hu and Yang, {Fu Liang}",

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AU - Huang, Wen Hsien

AU - Lien, Yu Chung

AU - Chen, Hsiu Chih

AU - Hsueh, Hsiao Ting

AU - Huang, Che Wei

AU - Lin, Chih Ting

AU - Liu, Yin Chih

AU - Lee, Ta Hsien

AU - Hua, Mu Yi

AU - Qiu, Jian Tai

AU - Liu, Mao Chen

AU - Lee, Yao Jen

AU - Shieh, Jia Min

AU - Ho, Chia Hua

AU - Hu, Chenming

AU - Yang, Fu Liang

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AB - This is the first study to successfully achieve record DNA sensitivity (sub-fM) by self-aligned, maskless, dual-channel, and metal-gate-based thin-film transistor nano-wire FET. Both novel device architecture (dual-channel) and optimization of integration processes (microcrystalline silicon and self-aligned sidewall sub-50 nm critical dimension) of nano-wire FET enhance the sensitivity to biological entities substantially. Meanwhile, the proposed device is accomplished with an embedded VLSI CMOS circuit. It can thus offer high application potential to pH, protein, and DNA probing in SoC-based portable bioelectronics.

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Sub-fM DNA sensitivity by self-aligned maskless thin-film transistor-based SoC bioelectronics

摘要

出版系列

會議

ASJC Scopus subject areas

存取文件

其它文件與鏈接

指紋

引用此