High throughput fluorescence based flow cytometer using 3D microfluidics for parallel sheath flow focusing and embeded high N.A. Microlens

We report a high throughput microfluidic fluorescence based flow cytometer with parallel sheath flow focusing in 32 channels using only 2 inlets. A detection throughput of 7000 beads/sec in each channel and 224,000 beads/sec for 32 channels has been accomplished. This fluorescence flow cytometer is realized by utilizing 3D soft lithography microfabrication technique to achieve multilayer PDMS structures with vertical vias connecting fluid in different layers. An array of high N.A. microball lens is also embedded in the structure to achieve parallel and high sensitivity fluorescence detection across these 32 channels.