@inproceedings{e7f6af259ea44098a488888d12df92bd,
title = "Fabrication of Biodegradable Soft Tissue-Mimicked Microelectrode Arrays for Implanted Neural Interfacing",
abstract = "This paper reports a method to fabricate biodegradable, adhesive and soft tissue-compliant microelectrode arrays (MEAs). MEAs composed of polylactic acid (PLA) biodegradable insulation layers and Pt/PLA hybrid electrodes can be fabricated in a batch by photolithography with a tunable photoresist/developer composition. The coordinated sacrificial layer dissolution and interfacial adhesion driven by an adhesive hydrogel enable directly transfer printing Pt-PLA MEAs stacks. This integrated process will allow, for first time, the batch production of implanted hydrogel MEAs composed of metal/organic composites as conformal electrodes and fully biodegradable insulation layers to show significantly lower impedance (0.1-2.5 kΩ) at 1 kHz as compared with those reported from most literatures. This device enables the success of both in-vivo site-specific neural stimulation and recording.",
keywords = "Biodegradable electronics, Hydrogel electronics, Microelectrode arrays, Neural interfaces, Platinum, Polylactic acid (PLA), Transfer printing",
author = "Huang, {Wei Chen} and Lei, {Wan Lou} and Peng, {Chih Wei}",
note = "Publisher Copyright: {\textcopyright} 2023 IEEE.; 36th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2023 ; Conference date: 15-01-2023 Through 19-01-2023",
year = "2023",
month = jan,
doi = "10.1109/MEMS49605.2023.10052266",
language = "English",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "392--395",
booktitle = "2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023",
address = "United States",
}