@article{f9463480eea342e695ce9dffd3aec8e4,
title = "Dramatically enhanced mechanical properties of diamond-like carbon films on polymer substrate for flexible display devices via argon plasma pretreatment",
abstract = "Hydrogen-free diamond-like carbon (DLC) films have been deposited on polyimide (PI) substrate at room temperature using the sputtering with a novel nanodiamond target. Also, argon plasma pretreatment procedure for PI substrate was optimized to improve the adhesion and characteristics of the as-prepared DLC film. The deposited DLC film on the PI substrate pretreated with −400 V of bias voltage was found to possess the highest sp3 bonding fraction of 53%, the pencil hardness of 3H, and the optical transmittance of 82%, respectively. The research work demonstrates prosperous applications of DLC films in the protective coating for commercialized optoelectronic devices.",
keywords = "Diamond-like carbon film, Flexible substrate, Pencil hardness, Radio frequency unbalanced magnetron sputtering",
author = "Lee, {Jen Ai} and Lin, {Chii Ruey} and Pan, {Po Chuan} and Liu, {Chi Wen} and Sun, {Albert Yin Tung}",
note = "Funding Information: The authors would like to thank Kai-Ming Chang, Pi-Hsian Wang, and Display Technology Center, Industrial Technology Research Institute (Hsinchu, Taiwan) for great support in PI sheet, AMOLED devices, and scratching tests. This research work was financially supported by the main research of Co-operation project of National Taipei University of Technology and Taipei Medical University under Grant no. NTUT-TMU-103-02, Ministry of Science and Technology of R.O.C under grant numbers MOST 106-2221-E-159-007 and MOST 107-2221-E-159 -006.",
year = "2020",
month = jan,
day = "15",
doi = "10.1016/j.chemphys.2019.110551",
language = "English",
volume = "529",
journal = "Chemical Physics",
issn = "0301-0104",
publisher = "Elsevier",
}