摘要
Hydrogen-free diamond-like carbon (DLC) films have been deposited on polyimide (PI) substrate at room temperature using the sputtering with a novel nanodiamond target. Also, argon plasma pretreatment procedure for PI substrate was optimized to improve the adhesion and characteristics of the as-prepared DLC film. The deposited DLC film on the PI substrate pretreated with −400 V of bias voltage was found to possess the highest sp3 bonding fraction of 53%, the pencil hardness of 3H, and the optical transmittance of 82%, respectively. The research work demonstrates prosperous applications of DLC films in the protective coating for commercialized optoelectronic devices.
原文 | 英語 |
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文章編號 | 110551 |
期刊 | Chemical Physics |
卷 | 529 |
DOIs | |
出版狀態 | 已發佈 - 1月 15 2020 |
ASJC Scopus subject areas
- 一般物理與天文學
- 物理與理論化學