摘要
In this work, CMOS-based tactile sensors using oxide as the sacrificial layer was demonstrated. The multiple metal layers and dielectric layers in the backend of CMOS processes were used to fabricate the moveable membrane of capacitive-based tactile sensors. The sensor was fabricated by the commercial 0.35 μm CMOS process and our self-developed post CMOS oxide etching. Three different via designs were proposed to adjust mechanical strength of the membrane electrode. A multivibrator circuit was utilized to decrease the parasitic effect of the capacitive sensors. The tactile sensors with point-type vias showed the best sensitivity of 2.65 Hz/mmHg with the dynamic range 0-388 mmHg.
原文 | 英語 |
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主出版物標題 | 2013 Transducers and Eurosensors XXVII |
主出版物子標題 | The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 |
頁面 | 1895-1898 |
頁數 | 4 |
DOIs | |
出版狀態 | 已發佈 - 2013 |
對外發佈 | 是 |
事件 | 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, 西班牙 持續時間: 6月 16 2013 → 6月 20 2013 |
會議
會議 | 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 |
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國家/地區 | 西班牙 |
城市 | Barcelona |
期間 | 6/16/13 → 6/20/13 |
ASJC Scopus subject areas
- 硬體和架構
- 電氣與電子工程