TY - GEN
T1 - Bridging fault diagnosis to identify the layer of systematic defects
AU - Chen, Po Juei
AU - Chien-Mo Li, James
AU - Chao, Hsing-Jasmine
PY - 2009
Y1 - 2009
N2 - Diagnosis for systematic defects is very critical for yield learning in nanometer technology. This paper presents a bridging fault diagnosis which identifies a single layer of systematic defects (LSD), where more than expected numbers of bridging faults are located. The proposed technique is a layout-aware diagnosis which contains bridging pair extraction, structural analysis, and layer-oriented covering. Instead of treating each failing CUT independently, a statistical method (Z-test) is applied to diagnose all CUTs simultaneously. Experiments on six of seven large ISCAS'89 benchmark circuits successfully diagnose LSD for single bridging fault as well as multiple bridging faults.
AB - Diagnosis for systematic defects is very critical for yield learning in nanometer technology. This paper presents a bridging fault diagnosis which identifies a single layer of systematic defects (LSD), where more than expected numbers of bridging faults are located. The proposed technique is a layout-aware diagnosis which contains bridging pair extraction, structural analysis, and layer-oriented covering. Instead of treating each failing CUT independently, a statistical method (Z-test) is applied to diagnose all CUTs simultaneously. Experiments on six of seven large ISCAS'89 benchmark circuits successfully diagnose LSD for single bridging fault as well as multiple bridging faults.
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U2 - 10.1109/ATS.2009.58
DO - 10.1109/ATS.2009.58
M3 - Conference contribution
AN - SCOPUS:77951168735
SN - 9780769538648
T3 - Proceedings of the Asian Test Symposium
SP - 349
EP - 354
BT - Proceedings of the 18th Asian Test Symposium, ATS 2009
T2 - 18th Asian Test Symposium, ATS 2009
Y2 - 23 November 2009 through 26 November 2009
ER -