Atomic layer deposition-based functionalization of materials for medical and environmental health applications

Roger J. Narayan, Shashishekar P. Adiga, Michael J. Pellin, Larry A. Curtiss, Alexander J. Hryn, Shane Stafslien, Bret Chisholm, Chun Che Shih, Chun Ming Shih, Shing Jong Lin, Yea Yang Su, Chunming Jin, Junping Zhang, Nancy A. Monteiro-Riviere, Jeffrey W. Elam