Analysis on microstructure and characteristics of TiAlN/CrN nano-multilayer films deposited by cathodic arc deposition

P. L. Sun; C. H. Hsu; S. H. Liu; C. Y. Su; C. K. Lin

doi:10.1016/j.tsf.2010.05.037

Analysis on microstructure and characteristics of TiAlN/CrN nano-multilayer films deposited by cathodic arc deposition

P. L. Sun, C. H. Hsu, S. H. Liu, C. Y. Su, C. K. Lin

研究成果: 雜誌貢獻 › 文章 › 同行評審

32 引文斯高帕斯（Scopus）

摘要

In this study, TiAlN/CrN multilayer thin films were deposited on SUS 403 stainless steel by cathodic arc deposition. The effects of substrate orientation (substrate surface parallel/perpendicular to target surface) and rotation speed were investigated in detail. Microstructure of the coatings was analyzed by X-ray diffraction, X-ray photoelectron spectroscopy and scanning electron microscopy. Meanwhile, tribological and corrosion tests were performed. The experimental results showed that the as-deposited films exhibit a nano-scale multilayer structure consisting of TiAlN and CrN phases. The TiAlN/CrN multilayer films prepared by a parallel orientation and a rotation speed of 4 rpm not only possesses the best coating hardness and hardness/elastic modulus ratio, but also reveals superior abrasion resistance and corrosion resistance.

原文	英語
頁（從 - 到）	7519-7522
頁數	4
期刊	Thin Solid Films
卷	518
發行號	24
DOIs	https://doi.org/10.1016/j.tsf.2010.05.037
出版狀態	已發佈 - 10月 1 2010
對外發佈	是

ASJC Scopus subject areas

電子、光磁材料
材料化學
金屬和合金
表面、塗料和薄膜
表面和介面

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10.1016/j.tsf.2010.05.037

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abstract = "In this study, TiAlN/CrN multilayer thin films were deposited on SUS 403 stainless steel by cathodic arc deposition. The effects of substrate orientation (substrate surface parallel/perpendicular to target surface) and rotation speed were investigated in detail. Microstructure of the coatings was analyzed by X-ray diffraction, X-ray photoelectron spectroscopy and scanning electron microscopy. Meanwhile, tribological and corrosion tests were performed. The experimental results showed that the as-deposited films exhibit a nano-scale multilayer structure consisting of TiAlN and CrN phases. The TiAlN/CrN multilayer films prepared by a parallel orientation and a rotation speed of 4 rpm not only possesses the best coating hardness and hardness/elastic modulus ratio, but also reveals superior abrasion resistance and corrosion resistance.",

keywords = "Abrasion, Cathodic arc deposition, Corrosion resistance, CrN, TiAlN",

author = "Sun, {P. L.} and Hsu, {C. H.} and Liu, {S. H.} and Su, {C. Y.} and Lin, {C. K.}",

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AU - Hsu, C. H.

AU - Liu, S. H.

AU - Su, C. Y.

AU - Lin, C. K.

PY - 2010/10/1

Y1 - 2010/10/1

N2 - In this study, TiAlN/CrN multilayer thin films were deposited on SUS 403 stainless steel by cathodic arc deposition. The effects of substrate orientation (substrate surface parallel/perpendicular to target surface) and rotation speed were investigated in detail. Microstructure of the coatings was analyzed by X-ray diffraction, X-ray photoelectron spectroscopy and scanning electron microscopy. Meanwhile, tribological and corrosion tests were performed. The experimental results showed that the as-deposited films exhibit a nano-scale multilayer structure consisting of TiAlN and CrN phases. The TiAlN/CrN multilayer films prepared by a parallel orientation and a rotation speed of 4 rpm not only possesses the best coating hardness and hardness/elastic modulus ratio, but also reveals superior abrasion resistance and corrosion resistance.

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KW - Abrasion

KW - Cathodic arc deposition

KW - Corrosion resistance

KW - CrN

KW - TiAlN

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Analysis on microstructure and characteristics of TiAlN/CrN nano-multilayer films deposited by cathodic arc deposition

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