摘要
In this study, TiAlN/CrN multilayer thin films were deposited on SUS 403 stainless steel by cathodic arc deposition. The effects of substrate orientation (substrate surface parallel/perpendicular to target surface) and rotation speed were investigated in detail. Microstructure of the coatings was analyzed by X-ray diffraction, X-ray photoelectron spectroscopy and scanning electron microscopy. Meanwhile, tribological and corrosion tests were performed. The experimental results showed that the as-deposited films exhibit a nano-scale multilayer structure consisting of TiAlN and CrN phases. The TiAlN/CrN multilayer films prepared by a parallel orientation and a rotation speed of 4 rpm not only possesses the best coating hardness and hardness/elastic modulus ratio, but also reveals superior abrasion resistance and corrosion resistance.
原文 | 英語 |
---|---|
頁(從 - 到) | 7519-7522 |
頁數 | 4 |
期刊 | Thin Solid Films |
卷 | 518 |
發行號 | 24 |
DOIs | |
出版狀態 | 已發佈 - 10月 1 2010 |
對外發佈 | 是 |
ASJC Scopus subject areas
- 電子、光磁材料
- 材料化學
- 金屬和合金
- 表面、塗料和薄膜
- 表面和介面