Transparent semiconductor zinc oxide thin films deposited on glass substrates by sol-gel process

Chien Yie Tsay, Kai Shiung Fan, Yu Wu Wang, Chi Jung Chang, Yung Kuan Tseng, Chung Kwei Lin

Research output: Contribution to journalArticlepeer-review

82 Citations (Scopus)


Transparent semiconductor ZnO thin films were spin-coated onto alkali-free glass substrates by a sol-gel process. The influence of ZnO sols synthesized via different solvents (2-ME, EtOH or IPA) on the surface morphologies, microstructures, optical properties and resistivities of the obtained films were investigated. The as-coated films were annealed in ambient air at 500 °C for 1 h. X-ray diffraction results showed all polycrystalline ZnO thin films to have preferred orientation along the (0 0 2) plane. The surface morphologies, optical transmittances and resistivity values of the sol-gel derived ZnO thin films depended on the solvent used. The ZnO thin films synthesized with IPA as the solvent exhibited the highest average transmittance 92.2%, an RMS roughness of 4.52 nm and a resistivity of 1.5 × 105 Ω cm.

Original languageEnglish
Pages (from-to)1791-1795
Number of pages5
JournalCeramics International
Issue number6
Publication statusPublished - Aug 2010
Externally publishedYes


  • A. Films
  • B. Surfaces
  • C. Optical properties
  • D. ZnO
  • Sol-gel processes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Materials Chemistry


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