The performance of high-frequency and picoliter-droplet inkjet printhead by a standard CMOS processes

Enhance of the number and array density of nozzles within an inkjet head chip is the key to raise the printing speed and printing resolutions. The smart printhead has been designed by a 0.5 um CMOS processes. The physical design rules of 0.5um 2P2M 12V/12V, (Double Poly Double Metal Vds/Vgs) high voltage process and MIXED-MODE processes. This study develops the integrated multiplexer driver inkjet head (IMDH) by a standard CMOS processes to reduce the connecting addresses needed for controlling the nozzle orifices which ejection the small size of droplet. By using both the high-dose current (HDC) driver and high-dose current driver integrated (HDCI) process, it is able to control over 400 nozzles within an inkjet head chip and improve the chipset packaging density and alignment accuracy. The spec of IMDH printhead developed by OES/ITRI is 408nozzles/432heaters, 5 pL of ejected droplet volume and with the operating firing frequency of 18kHz. Combining both the HDCI process and high-density micro-fluidic channel design architecture, IMDH inkjet head is the supreme product developed by OES/ITRI in the present state and is the same or even higher level with famous factory's highest end of commercial products. This technology could be applied not only on the inkjet printhead products but also on many other applications.