The microchannel of microfluidic chip fabrication by micro-powder blasting

C. F. Huang; Y. K. Shen; Y. Lin; C. W. Wu

doi:10.4028/www.scientific.net/AMR.76-78.367

The microchannel of microfluidic chip fabrication by micro-powder blasting

C. F. Huang
, Y. K. Shen
, Y. Lin
, C. W. Wu

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The process of micro-powder blasting is the high speed gas flow which mixed the micro-particle and gas to impact the brittle substrate by the specialized nozzle. This paper combined various diameters Al₂O₃ eroding particle with a novel masking technique to fabricate the pattern channels in soda glass with a width to 2000 μm and depth down to 1631 μm. The masking technology for fabricating microchannel is consisted by the combination of two polymers: 1) the elastic and thermal-curable poly-(dimethyl siloxane) (PDMS) for its erosion resistance and 2) the brittle epoxy resin SU-8 for its photosensitivity. This paper discusses the processing procedure by the different processing parameters (micro-powder impact pressure, the distance between nozzle and substrate, micro-powder size, and micro-powder impact time) to find the optimal process. The results show that the micro-powder size is the most important factor for the depth of microchannel of microfluidic chip. The surface roughness of microchannel of microfluidic chip is nearly 5-6μm.

Original language	English
Title of host publication	Advances in Abrasive Technology XII
Pages	367-372
Number of pages	6
DOIs	https://doi.org/10.4028/www.scientific.net/AMR.76-78.367
Publication status	Published - 2009
Event	12th International Symposium on Advances in Abrasive Technology, ISAAT2009 - Gold Coast, QLD, Australia Duration: Sept 27 2009 → Sept 30 2009

Publication series

Name	Advanced Materials Research
Volume	76-78
ISSN (Print)	1022-6680

Other

Other	12th International Symposium on Advances in Abrasive Technology, ISAAT2009
Country/Territory	Australia
City	Gold Coast, QLD
Period	9/27/09 → 9/30/09

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

Depth
Micro-powder blasting
Microchannel
Processing parameters
Surface roughness

ASJC Scopus subject areas

General Engineering

Access to Document

10.4028/www.scientific.net/AMR.76-78.367

Cite this

Huang, CF , Shen, YK, Lin, Y & Wu, CW 2009, The microchannel of microfluidic chip fabrication by micro-powder blasting. in Advances in Abrasive Technology XII. Advanced Materials Research, vol. 76-78, pp. 367-372, 12th International Symposium on Advances in Abrasive Technology, ISAAT2009, Gold Coast, QLD, Australia, 9/27/09. https://doi.org/10.4028/www.scientific.net/AMR.76-78.367

@inproceedings{dcbd9f9340564132a041a0d90183f645,

title = "The microchannel of microfluidic chip fabrication by micro-powder blasting",

abstract = "The process of micro-powder blasting is the high speed gas flow which mixed the micro-particle and gas to impact the brittle substrate by the specialized nozzle. This paper combined various diameters Al2O3 eroding particle with a novel masking technique to fabricate the pattern channels in soda glass with a width to 2000 μm and depth down to 1631 μm. The masking technology for fabricating microchannel is consisted by the combination of two polymers: 1) the elastic and thermal-curable poly-(dimethyl siloxane) (PDMS) for its erosion resistance and 2) the brittle epoxy resin SU-8 for its photosensitivity. This paper discusses the processing procedure by the different processing parameters (micro-powder impact pressure, the distance between nozzle and substrate, micro-powder size, and micro-powder impact time) to find the optimal process. The results show that the micro-powder size is the most important factor for the depth of microchannel of microfluidic chip. The surface roughness of microchannel of microfluidic chip is nearly 5-6μm.",

keywords = "Depth, Micro-powder blasting, Microchannel, Processing parameters, Surface roughness",

author = "Huang, \{C. F.\} and Shen, \{Y. K.\} and Y. Lin and Wu, \{C. W.\}",

year = "2009",

doi = "10.4028/www.scientific.net/AMR.76-78.367",

language = "English",

isbn = "087849314X",

series = "Advanced Materials Research",

pages = "367--372",

booktitle = "Advances in Abrasive Technology XII",

note = "12th International Symposium on Advances in Abrasive Technology, ISAAT2009 ; Conference date: 27-09-2009 Through 30-09-2009",

}

TY - GEN

T1 - The microchannel of microfluidic chip fabrication by micro-powder blasting

AU - Huang, C. F.

AU - Shen, Y. K.

AU - Lin, Y.

AU - Wu, C. W.

PY - 2009

Y1 - 2009

N2 - The process of micro-powder blasting is the high speed gas flow which mixed the micro-particle and gas to impact the brittle substrate by the specialized nozzle. This paper combined various diameters Al2O3 eroding particle with a novel masking technique to fabricate the pattern channels in soda glass with a width to 2000 μm and depth down to 1631 μm. The masking technology for fabricating microchannel is consisted by the combination of two polymers: 1) the elastic and thermal-curable poly-(dimethyl siloxane) (PDMS) for its erosion resistance and 2) the brittle epoxy resin SU-8 for its photosensitivity. This paper discusses the processing procedure by the different processing parameters (micro-powder impact pressure, the distance between nozzle and substrate, micro-powder size, and micro-powder impact time) to find the optimal process. The results show that the micro-powder size is the most important factor for the depth of microchannel of microfluidic chip. The surface roughness of microchannel of microfluidic chip is nearly 5-6μm.

AB - The process of micro-powder blasting is the high speed gas flow which mixed the micro-particle and gas to impact the brittle substrate by the specialized nozzle. This paper combined various diameters Al2O3 eroding particle with a novel masking technique to fabricate the pattern channels in soda glass with a width to 2000 μm and depth down to 1631 μm. The masking technology for fabricating microchannel is consisted by the combination of two polymers: 1) the elastic and thermal-curable poly-(dimethyl siloxane) (PDMS) for its erosion resistance and 2) the brittle epoxy resin SU-8 for its photosensitivity. This paper discusses the processing procedure by the different processing parameters (micro-powder impact pressure, the distance between nozzle and substrate, micro-powder size, and micro-powder impact time) to find the optimal process. The results show that the micro-powder size is the most important factor for the depth of microchannel of microfluidic chip. The surface roughness of microchannel of microfluidic chip is nearly 5-6μm.

KW - Depth

KW - Micro-powder blasting

KW - Microchannel

KW - Processing parameters

KW - Surface roughness

UR - https://www.scopus.com/pages/publications/73949137756

UR - https://www.scopus.com/pages/publications/73949137756#tab=citedBy

U2 - 10.4028/www.scientific.net/AMR.76-78.367

DO - 10.4028/www.scientific.net/AMR.76-78.367

M3 - Conference contribution

AN - SCOPUS:73949137756

SN - 087849314X

SN - 9780878493142

T3 - Advanced Materials Research

SP - 367

EP - 372

BT - Advances in Abrasive Technology XII

T2 - 12th International Symposium on Advances in Abrasive Technology, ISAAT2009

Y2 - 27 September 2009 through 30 September 2009

ER -

The microchannel of microfluidic chip fabrication by micro-powder blasting

Abstract

Publication series

Other

UN SDGs

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this