TY - GEN
T1 - The microchannel of microfluidic chip fabrication by micro-powder blasting
AU - Huang, C. F.
AU - Shen, Y. K.
AU - Lin, Y.
AU - Wu, C. W.
PY - 2009
Y1 - 2009
N2 - The process of micro-powder blasting is the high speed gas flow which mixed the micro-particle and gas to impact the brittle substrate by the specialized nozzle. This paper combined various diameters Al2O3 eroding particle with a novel masking technique to fabricate the pattern channels in soda glass with a width to 2000 μm and depth down to 1631 μm. The masking technology for fabricating microchannel is consisted by the combination of two polymers: 1) the elastic and thermal-curable poly-(dimethyl siloxane) (PDMS) for its erosion resistance and 2) the brittle epoxy resin SU-8 for its photosensitivity. This paper discusses the processing procedure by the different processing parameters (micro-powder impact pressure, the distance between nozzle and substrate, micro-powder size, and micro-powder impact time) to find the optimal process. The results show that the micro-powder size is the most important factor for the depth of microchannel of microfluidic chip. The surface roughness of microchannel of microfluidic chip is nearly 5-6μm.
AB - The process of micro-powder blasting is the high speed gas flow which mixed the micro-particle and gas to impact the brittle substrate by the specialized nozzle. This paper combined various diameters Al2O3 eroding particle with a novel masking technique to fabricate the pattern channels in soda glass with a width to 2000 μm and depth down to 1631 μm. The masking technology for fabricating microchannel is consisted by the combination of two polymers: 1) the elastic and thermal-curable poly-(dimethyl siloxane) (PDMS) for its erosion resistance and 2) the brittle epoxy resin SU-8 for its photosensitivity. This paper discusses the processing procedure by the different processing parameters (micro-powder impact pressure, the distance between nozzle and substrate, micro-powder size, and micro-powder impact time) to find the optimal process. The results show that the micro-powder size is the most important factor for the depth of microchannel of microfluidic chip. The surface roughness of microchannel of microfluidic chip is nearly 5-6μm.
KW - Depth
KW - Micro-powder blasting
KW - Microchannel
KW - Processing parameters
KW - Surface roughness
UR - http://www.scopus.com/inward/record.url?scp=73949137756&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=73949137756&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/AMR.76-78.367
DO - 10.4028/www.scientific.net/AMR.76-78.367
M3 - Conference contribution
AN - SCOPUS:73949137756
SN - 087849314X
SN - 9780878493142
T3 - Advanced Materials Research
SP - 367
EP - 372
BT - Advances in Abrasive Technology XII
T2 - 12th International Symposium on Advances in Abrasive Technology, ISAAT2009
Y2 - 27 September 2009 through 30 September 2009
ER -