Surface properties of nano-Structural silicon-Doped carbon films for biomedical applications

Shih Fu Ou, Chin Sung Chen, Hossein Hosseinkhani, Chih Hua Yu, Yun Dun Shen, Keng Liang Ou

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)


Hydrogenated diamond-like carbon (DLC) containing Si films were synthesised using the radio frequency plasma enhanced chemical vapour deposition. The results show that all Si-doped DLC films exhibited a similar amorphous structure as non-doped DLC films. Doping Si caused graphitisation of C and reduced the surface hardness. Moreover, the surface roughness of the films decreased with the Si content, which consequently decreased the water contact angle of the film surfaces. Such hydrophilic property reveals the possibility of applying Si-doped amorphous diamond-like carbon films as a bioactive treatment on biomedical implant surfaces.

Original languageEnglish
Pages (from-to)945-958
Number of pages14
JournalInternational Journal of Nanotechnology
Issue number10-11
Publication statusPublished - 2013


  • Chemical vapour deposition
  • Diamond-like carbon
  • Nanotechnology
  • Silicon
  • Surface

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Materials Chemistry
  • Condensed Matter Physics
  • Bioengineering


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