Researches of Mechanical Properties and Biocompatibility on Nanocrystalline Diamond

J. M. Hung, C. Z. Wu, K. L. Ou, C. M. Liu, P. W. Peng

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)


Nanocrystalline diamond (NCD) films were synthesized using microwave plasma chemical vapor deposition procedure with the CH4/Ar/H2 gas mixture on silicon substrate at moderate temperatures in the present study. The characteristics of NCD films were evaluated using scanning electron microscopy, Raman spectroscopy, transmission electron microscopy, optical emission spectroscopy and optical contact angle meter. The analytical results revealed that C2 radial was the dominant species in the deposited process. From TEM observation the NCD films was formed via the etching of hydrocarbons and a small amount of hydrogen content additive into gas mixture could improve the aggregation of the nucleation film to form the NCD films. A (crystalline → amorphous-like → nanocrystalline structure) transition occurred during formation of NCD films. The more hydrophobic surfaces implied that NCD films were the potential biomaterial in the application of article heart valve or stent.

Original languageEnglish
Title of host publication18th International Vacuum Congress, IVC 2010
PublisherElsevier B.V.
Number of pages10
ISBN (Electronic)9781627487481
Publication statusPublished - 2012
Event18th International Vacuum Congress, IVC 2010 - Beijing, China
Duration: Aug 23 2010Aug 27 2010


Other18th International Vacuum Congress, IVC 2010


  • chemical vapor deposition
  • hydrogen
  • microwave plasma
  • nanocrystalline diamond

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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