Pulsed laser deposition of (WO3)1 - X(Nb 2O5)x thin films: Characterization and gasochromic studies

Chia Hao Hsu; Chung Chieh Chang; Kuo Wei Yeh; Yu Ruei Wu; Chih Chieh Chan; Ming Jye Wang; Mau Kuen Wu

doi:10.1016/j.tsf.2011.07.062

Pulsed laser deposition of (WO₃)_{1 - X}(Nb ₂O₅)_x thin films: Characterization and gasochromic studies

Chia Hao Hsu, Chung Chieh Chang, Kuo Wei Yeh, Yu Ruei Wu, Chih Chieh Chan, Ming Jye Wang, Mau Kuen Wu

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

A series of (WO₃)_{1 - x}(Nb₂O ₅)_x (x = 0, 0.05, 0.1 and 0.15) mixed oxide films were fabricated by pulsed laser deposition (PLD) at 27 Pa oxygen partial pressure on ITO glass substrates. The thickness of the (WO₃) _{1 - x}(Nb₂O₅)_x thin films is about 350 ± 30 nm and their surface has a uniform morphology. A layer of platinum (Pt) was then sputtered onto the surface of the film. The hydrogen gas sensing performance of Pt catalyst activated (WO₃) _{1 - x}(Nb₂O₅)_x thin films were investigated. The cycling of the coloration was obtained from UV-vis spectra. Gasochromic coloration of (WO₃)_{1 - x}(Nb₂O ₅)_x thin films were investigated at room temperature in H₂-N₂ mixtures containing 1-100 mol% of H₂. The results show that the shortest response time of (WO₃) _{1 - x}(Nb₂O₅)_x/Pt hydrogen sensor is within 30 s and the highest transmittance change (ΔT) varies from 20% to 30%.

Original language	English
Pages (from-to)	1470-1474
Number of pages	5
Journal	Thin Solid Films
Volume	520
Issue number	5
DOIs	https://doi.org/10.1016/j.tsf.2011.07.062
Publication status	Published - Dec 30 2011
Externally published	Yes

Keywords

Gasochromic
Hydrogen sensor
Niobium oxide
PLD
Tungsten oxide

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Materials Chemistry
Metals and Alloys
Surfaces, Coatings and Films
Surfaces and Interfaces

Access to Document

10.1016/j.tsf.2011.07.062

Cite this

@article{08740b28efe24607ab7e3032e8ab34de,

title = "Pulsed laser deposition of (WO3)1 - X(Nb 2O5)x thin films: Characterization and gasochromic studies",

abstract = "A series of (WO3)1 - x(Nb2O 5)x (x = 0, 0.05, 0.1 and 0.15) mixed oxide films were fabricated by pulsed laser deposition (PLD) at 27 Pa oxygen partial pressure on ITO glass substrates. The thickness of the (WO3) 1 - x(Nb2O5)x thin films is about 350 ± 30 nm and their surface has a uniform morphology. A layer of platinum (Pt) was then sputtered onto the surface of the film. The hydrogen gas sensing performance of Pt catalyst activated (WO3) 1 - x(Nb2O5)x thin films were investigated. The cycling of the coloration was obtained from UV-vis spectra. Gasochromic coloration of (WO3)1 - x(Nb2O 5)x thin films were investigated at room temperature in H2-N2 mixtures containing 1-100 mol% of H2. The results show that the shortest response time of (WO3) 1 - x(Nb2O5)x/Pt hydrogen sensor is within 30 s and the highest transmittance change (ΔT) varies from 20% to 30%.",

keywords = "Gasochromic, Hydrogen sensor, Niobium oxide, PLD, Tungsten oxide",

author = "Hsu, {Chia Hao} and Chang, {Chung Chieh} and Yeh, {Kuo Wei} and Wu, {Yu Ruei} and Chan, {Chih Chieh} and Wang, {Ming Jye} and Wu, {Mau Kuen}",

note = "Funding Information: This work was founded by the National Science Council of Taiwan under grants NSC99-2112-M-001-028-MY3 and NSC99-2221-E-035-087 .",

year = "2011",

month = dec,

day = "30",

doi = "10.1016/j.tsf.2011.07.062",

language = "English",

volume = "520",

pages = "1470--1474",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

number = "5",

}

TY - JOUR

T1 - Pulsed laser deposition of (WO3)1 - X(Nb 2O5)x thin films

T2 - Characterization and gasochromic studies

AU - Hsu, Chia Hao

AU - Chang, Chung Chieh

AU - Yeh, Kuo Wei

AU - Wu, Yu Ruei

AU - Chan, Chih Chieh

AU - Wang, Ming Jye

AU - Wu, Mau Kuen

N1 - Funding Information: This work was founded by the National Science Council of Taiwan under grants NSC99-2112-M-001-028-MY3 and NSC99-2221-E-035-087 .

PY - 2011/12/30

Y1 - 2011/12/30

N2 - A series of (WO3)1 - x(Nb2O 5)x (x = 0, 0.05, 0.1 and 0.15) mixed oxide films were fabricated by pulsed laser deposition (PLD) at 27 Pa oxygen partial pressure on ITO glass substrates. The thickness of the (WO3) 1 - x(Nb2O5)x thin films is about 350 ± 30 nm and their surface has a uniform morphology. A layer of platinum (Pt) was then sputtered onto the surface of the film. The hydrogen gas sensing performance of Pt catalyst activated (WO3) 1 - x(Nb2O5)x thin films were investigated. The cycling of the coloration was obtained from UV-vis spectra. Gasochromic coloration of (WO3)1 - x(Nb2O 5)x thin films were investigated at room temperature in H2-N2 mixtures containing 1-100 mol% of H2. The results show that the shortest response time of (WO3) 1 - x(Nb2O5)x/Pt hydrogen sensor is within 30 s and the highest transmittance change (ΔT) varies from 20% to 30%.

AB - A series of (WO3)1 - x(Nb2O 5)x (x = 0, 0.05, 0.1 and 0.15) mixed oxide films were fabricated by pulsed laser deposition (PLD) at 27 Pa oxygen partial pressure on ITO glass substrates. The thickness of the (WO3) 1 - x(Nb2O5)x thin films is about 350 ± 30 nm and their surface has a uniform morphology. A layer of platinum (Pt) was then sputtered onto the surface of the film. The hydrogen gas sensing performance of Pt catalyst activated (WO3) 1 - x(Nb2O5)x thin films were investigated. The cycling of the coloration was obtained from UV-vis spectra. Gasochromic coloration of (WO3)1 - x(Nb2O 5)x thin films were investigated at room temperature in H2-N2 mixtures containing 1-100 mol% of H2. The results show that the shortest response time of (WO3) 1 - x(Nb2O5)x/Pt hydrogen sensor is within 30 s and the highest transmittance change (ΔT) varies from 20% to 30%.

KW - Gasochromic

KW - Hydrogen sensor

KW - Niobium oxide

KW - PLD

KW - Tungsten oxide

UR - http://www.scopus.com/inward/record.url?scp=82755189455&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=82755189455&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2011.07.062

DO - 10.1016/j.tsf.2011.07.062

M3 - Article

AN - SCOPUS:82755189455

SN - 0040-6090

VL - 520

SP - 1470

EP - 1474

JO - Thin Solid Films

JF - Thin Solid Films

IS - 5

ER -