Phase transformation of diamond-like carbon/silver composite films by sputtering deposition

Shyuan Yow Chen; Keng Liang Ou; Wei Chen Huang; Kuo Tien Chu; Shih Fu Ou

doi:10.1016/j.ceramint.2012.09.019

Phase transformation of diamond-like carbon/silver composite films by sputtering deposition

Shyuan Yow Chen, Keng Liang Ou, Wei Chen Huang, Kuo Tien Chu, Shih Fu Ou

Research output: Contribution to journal › Article › peer-review

31 Citations (Scopus)

Abstract

This study fabricated hydrogenated diamond-like carbon/silver bioceramic films on glass substrates using radio frequency magnetron sputtering with a single silver target in an atmosphere of Ar/CH4 mixture. The effects of applied power on the composition and microstructure of bioceramic film were evaluated. A phase transformation, amorphous diamond-like carbon → nano-silver precipitation → nano-silver growth in the amorphous diamond-like carbon matrix was observed during sputtering. The film growth rate, surface roughness, silver content and size of silver nanoclusters in the films all increased with the silver target power due to the higher flux of sputtered silver species toward the substrate.

Original language	English
Pages (from-to)	2575-2580
Number of pages	6
Journal	Ceramics International
Volume	39
Issue number	3
DOIs	https://doi.org/10.1016/j.ceramint.2012.09.019
Publication status	Published - Apr 2013

Keywords

B. Nanocomposites
Silver-containing diamond-like carbon
Sputtering

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Ceramics and Composites
Materials Chemistry
Surfaces, Coatings and Films
Process Chemistry and Technology

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10.1016/j.ceramint.2012.09.019

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title = "Phase transformation of diamond-like carbon/silver composite films by sputtering deposition",

abstract = "This study fabricated hydrogenated diamond-like carbon/silver bioceramic films on glass substrates using radio frequency magnetron sputtering with a single silver target in an atmosphere of Ar/CH4 mixture. The effects of applied power on the composition and microstructure of bioceramic film were evaluated. A phase transformation, amorphous diamond-like carbon → nano-silver precipitation → nano-silver growth in the amorphous diamond-like carbon matrix was observed during sputtering. The film growth rate, surface roughness, silver content and size of silver nanoclusters in the films all increased with the silver target power due to the higher flux of sputtered silver species toward the substrate.",

keywords = "B. Nanocomposites, Silver-containing diamond-like carbon, Sputtering",

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T1 - Phase transformation of diamond-like carbon/silver composite films by sputtering deposition

AU - Chen, Shyuan Yow

AU - Ou, Keng Liang

AU - Huang, Wei Chen

AU - Chu, Kuo Tien

AU - Ou, Shih Fu

PY - 2013/4

Y1 - 2013/4

N2 - This study fabricated hydrogenated diamond-like carbon/silver bioceramic films on glass substrates using radio frequency magnetron sputtering with a single silver target in an atmosphere of Ar/CH4 mixture. The effects of applied power on the composition and microstructure of bioceramic film were evaluated. A phase transformation, amorphous diamond-like carbon → nano-silver precipitation → nano-silver growth in the amorphous diamond-like carbon matrix was observed during sputtering. The film growth rate, surface roughness, silver content and size of silver nanoclusters in the films all increased with the silver target power due to the higher flux of sputtered silver species toward the substrate.

AB - This study fabricated hydrogenated diamond-like carbon/silver bioceramic films on glass substrates using radio frequency magnetron sputtering with a single silver target in an atmosphere of Ar/CH4 mixture. The effects of applied power on the composition and microstructure of bioceramic film were evaluated. A phase transformation, amorphous diamond-like carbon → nano-silver precipitation → nano-silver growth in the amorphous diamond-like carbon matrix was observed during sputtering. The film growth rate, surface roughness, silver content and size of silver nanoclusters in the films all increased with the silver target power due to the higher flux of sputtered silver species toward the substrate.

KW - B. Nanocomposites

KW - Silver-containing diamond-like carbon

KW - Sputtering

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M3 - Article

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JO - Ceramics International

JF - Ceramics International

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Phase transformation of diamond-like carbon/silver composite films by sputtering deposition

Abstract

Keywords

ASJC Scopus subject areas

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