Abstract
This study fabricated hydrogenated diamond-like carbon/silver bioceramic films on glass substrates using radio frequency magnetron sputtering with a single silver target in an atmosphere of Ar/CH4 mixture. The effects of applied power on the composition and microstructure of bioceramic film were evaluated. A phase transformation, amorphous diamond-like carbon → nano-silver precipitation → nano-silver growth in the amorphous diamond-like carbon matrix was observed during sputtering. The film growth rate, surface roughness, silver content and size of silver nanoclusters in the films all increased with the silver target power due to the higher flux of sputtered silver species toward the substrate.
Original language | English |
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Pages (from-to) | 2575-2580 |
Number of pages | 6 |
Journal | Ceramics International |
Volume | 39 |
Issue number | 3 |
DOIs | |
Publication status | Published - Apr 2013 |
Keywords
- B. Nanocomposites
- Silver-containing diamond-like carbon
- Sputtering
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Ceramics and Composites
- Materials Chemistry
- Surfaces, Coatings and Films
- Process Chemistry and Technology