Phase transformation of diamond-like carbon/silver composite films by sputtering deposition

Shyuan Yow Chen, Keng Liang Ou, Wei Chen Huang, Kuo Tien Chu, Shih Fu Ou

Research output: Contribution to journalArticlepeer-review

30 Citations (Scopus)


This study fabricated hydrogenated diamond-like carbon/silver bioceramic films on glass substrates using radio frequency magnetron sputtering with a single silver target in an atmosphere of Ar/CH4 mixture. The effects of applied power on the composition and microstructure of bioceramic film were evaluated. A phase transformation, amorphous diamond-like carbon → nano-silver precipitation → nano-silver growth in the amorphous diamond-like carbon matrix was observed during sputtering. The film growth rate, surface roughness, silver content and size of silver nanoclusters in the films all increased with the silver target power due to the higher flux of sputtered silver species toward the substrate.

Original languageEnglish
Pages (from-to)2575-2580
Number of pages6
JournalCeramics International
Issue number3
Publication statusPublished - Apr 2013


  • B. Nanocomposites
  • Silver-containing diamond-like carbon
  • Sputtering

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Process Chemistry and Technology


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