Microstructure of silicon-incorporated carbon films with various silicon concentrations deposited by hybrid magnetron sputtering/chemical vapor deposition

Hsin Chung Cheng, Peter Da-yun Wang, Wen Chien Lan, Pei Yi Wang, Shih Fu Ou, Ya Ju Hsu, Keng Liang Ou

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

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Material Science

Chemical Engineering