Erratum: Microstructure of silicon-incorporated carbon films with various silicon concentrations deposited by hybrid magnetron sputtering/chemical vapor deposition (Ceramics International (2013) 39 (5585-5590))

Hsin Chung Cheng; Da Yen Wang; Wen Chien Lan; Pei Yi Wang; Shih Fu Ou; Ya Juh Su; Keng Liang Ou

doi:10.1016/j.ceramint.2014.01.066

Erratum: Microstructure of silicon-incorporated carbon films with various silicon concentrations deposited by hybrid magnetron sputtering/chemical vapor deposition (Ceramics International (2013) 39 (5585-5590))

Hsin Chung Cheng, Da Yen Wang, Wen Chien Lan, Pei Yi Wang, Shih Fu Ou, Ya Juh Su, Keng Liang Ou

Research output: Contribution to journal › Comment/debate › peer-review

Original language	English
Pages (from-to)	8935
Number of pages	1
Journal	Ceramics International
Volume	40
Issue number	6
DOIs	https://doi.org/10.1016/j.ceramint.2014.01.066
Publication status	Published - Jul 2014

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Ceramics and Composites
Process Chemistry and Technology
Surfaces, Coatings and Films
Materials Chemistry

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10.1016/j.ceramint.2014.01.066

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Cheng, H. C., Wang, D. Y., Lan, W. C., Wang, P. Y., Ou, S. F., Su, Y. J., & Ou, K. L. (2014). Erratum: Microstructure of silicon-incorporated carbon films with various silicon concentrations deposited by hybrid magnetron sputtering/chemical vapor deposition (Ceramics International (2013) 39 (5585-5590)). Ceramics International, 40(6), 8935. https://doi.org/10.1016/j.ceramint.2014.01.066

Erratum: Microstructure of silicon-incorporated carbon films with various silicon concentrations deposited by hybrid magnetron sputtering/chemical vapor deposition (Ceramics International (2013) 39 (5585-5590)). / Cheng, Hsin Chung; Wang, Da Yen; Lan, Wen Chien et al.
In: Ceramics International, Vol. 40, No. 6, 07.2014, p. 8935.

Research output: Contribution to journal › Comment/debate › peer-review

Cheng, HC, Wang, DY, Lan, WC, Wang, PY, Ou, SF, Su, YJ & Ou, KL 2014, 'Erratum: Microstructure of silicon-incorporated carbon films with various silicon concentrations deposited by hybrid magnetron sputtering/chemical vapor deposition (Ceramics International (2013) 39 (5585-5590))', Ceramics International, vol. 40, no. 6, pp. 8935. https://doi.org/10.1016/j.ceramint.2014.01.066

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author = "Cheng, {Hsin Chung} and Wang, {Da Yen} and Lan, {Wen Chien} and Wang, {Pei Yi} and Ou, {Shih Fu} and Su, {Ya Juh} and Ou, {Keng Liang}",

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Erratum: Microstructure of silicon-incorporated carbon films with various silicon concentrations deposited by hybrid magnetron sputtering/chemical vapor deposition (Ceramics International (2013) 39 (5585-5590))

ASJC Scopus subject areas

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