Dramatically enhanced mechanical properties of diamond-like carbon films on polymer substrate for flexible display devices via argon plasma pretreatment

Jen Ai Lee; Chii Ruey Lin; Po Chuan Pan; Chi Wen Liu; Albert Yin Tung Sun

doi:10.1016/j.chemphys.2019.110551

Dramatically enhanced mechanical properties of diamond-like carbon films on polymer substrate for flexible display devices via argon plasma pretreatment

Jen Ai Lee, Chii Ruey Lin, Po Chuan Pan, Chi Wen Liu, Albert Yin Tung Sun

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

Hydrogen-free diamond-like carbon (DLC) films have been deposited on polyimide (PI) substrate at room temperature using the sputtering with a novel nanodiamond target. Also, argon plasma pretreatment procedure for PI substrate was optimized to improve the adhesion and characteristics of the as-prepared DLC film. The deposited DLC film on the PI substrate pretreated with −400 V of bias voltage was found to possess the highest sp³ bonding fraction of 53%, the pencil hardness of 3H, and the optical transmittance of 82%, respectively. The research work demonstrates prosperous applications of DLC films in the protective coating for commercialized optoelectronic devices.

Original language	English
Article number	110551
Journal	Chemical Physics
Volume	529
DOIs	https://doi.org/10.1016/j.chemphys.2019.110551
Publication status	Published - Jan 15 2020

Keywords

Diamond-like carbon film
Flexible substrate
Pencil hardness
Radio frequency unbalanced magnetron sputtering

ASJC Scopus subject areas

General Physics and Astronomy
Physical and Theoretical Chemistry

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10.1016/j.chemphys.2019.110551

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title = "Dramatically enhanced mechanical properties of diamond-like carbon films on polymer substrate for flexible display devices via argon plasma pretreatment",

abstract = "Hydrogen-free diamond-like carbon (DLC) films have been deposited on polyimide (PI) substrate at room temperature using the sputtering with a novel nanodiamond target. Also, argon plasma pretreatment procedure for PI substrate was optimized to improve the adhesion and characteristics of the as-prepared DLC film. The deposited DLC film on the PI substrate pretreated with −400 V of bias voltage was found to possess the highest sp3 bonding fraction of 53%, the pencil hardness of 3H, and the optical transmittance of 82%, respectively. The research work demonstrates prosperous applications of DLC films in the protective coating for commercialized optoelectronic devices.",

keywords = "Diamond-like carbon film, Flexible substrate, Pencil hardness, Radio frequency unbalanced magnetron sputtering",

author = "Lee, {Jen Ai} and Lin, {Chii Ruey} and Pan, {Po Chuan} and Liu, {Chi Wen} and Sun, {Albert Yin Tung}",

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year = "2020",

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doi = "10.1016/j.chemphys.2019.110551",

language = "English",

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T1 - Dramatically enhanced mechanical properties of diamond-like carbon films on polymer substrate for flexible display devices via argon plasma pretreatment

AU - Lee, Jen Ai

AU - Lin, Chii Ruey

AU - Pan, Po Chuan

AU - Liu, Chi Wen

AU - Sun, Albert Yin Tung

PY - 2020/1/15

Y1 - 2020/1/15

N2 - Hydrogen-free diamond-like carbon (DLC) films have been deposited on polyimide (PI) substrate at room temperature using the sputtering with a novel nanodiamond target. Also, argon plasma pretreatment procedure for PI substrate was optimized to improve the adhesion and characteristics of the as-prepared DLC film. The deposited DLC film on the PI substrate pretreated with −400 V of bias voltage was found to possess the highest sp3 bonding fraction of 53%, the pencil hardness of 3H, and the optical transmittance of 82%, respectively. The research work demonstrates prosperous applications of DLC films in the protective coating for commercialized optoelectronic devices.

AB - Hydrogen-free diamond-like carbon (DLC) films have been deposited on polyimide (PI) substrate at room temperature using the sputtering with a novel nanodiamond target. Also, argon plasma pretreatment procedure for PI substrate was optimized to improve the adhesion and characteristics of the as-prepared DLC film. The deposited DLC film on the PI substrate pretreated with −400 V of bias voltage was found to possess the highest sp3 bonding fraction of 53%, the pencil hardness of 3H, and the optical transmittance of 82%, respectively. The research work demonstrates prosperous applications of DLC films in the protective coating for commercialized optoelectronic devices.

KW - Diamond-like carbon film

KW - Flexible substrate

KW - Pencil hardness

KW - Radio frequency unbalanced magnetron sputtering

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Dramatically enhanced mechanical properties of diamond-like carbon films on polymer substrate for flexible display devices via argon plasma pretreatment

Abstract

Keywords

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