Development of an active micromixer by dielectrophrosis particle manipulating

Szu I. Yeh; Ching Jiun Lee; Yu Jui Fan; Cheng Peng Liu; Horn Jiunn Sheen

doi:10.1109/NEMS.2010.5592492

Development of an active micromixer by dielectrophrosis particle manipulating

Szu I. Yeh, Ching Jiun Lee, Yu Jui Fan, Cheng Peng Liu, Horn Jiunn Sheen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

A particle manipulating micromixer was developed successfully in this study. The present device was fabricated by simply MEMS process. Only two photomasks, one for electrode array chip and another for micro-channel, were needed to manufacture the micromixer. Dielectrophoresis (DEP) force was used to manipulate the particles in the micro-channel. In this experience, polymer particles with diameter of 1μm were tested in the fluid with conductivity of 0.10mS/cm. The results show that the symmetrical vortices were observed at frequency of 100 kHz. The traveling wave DEP (twDEP) occurred when the input frequency was 10MHz. Micro-mixer chip which can stir fluid to achieve mixing was fabricated successfully by combining an electro array chip and Y-type micro-channel. The mixing performance depends on the voltage input. The flow phenomena were obtained and analyzed by micro-PIV technology. In the future, different cells can be manipulated by the present micromixer to achieve the rapid mixing with different driving frequency. It is useful in the biological or biomedical application.

Original language	English
Title of host publication	2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Pages	662-665
Number of pages	4
DOIs	https://doi.org/10.1109/NEMS.2010.5592492
Publication status	Published - 2010
Externally published	Yes
Event	5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 - Xiamen, China Duration: Jan 20 2010 → Jan 23 2010

Publication series

Name	2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

Conference

Conference	5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Country/Territory	China
City	Xiamen
Period	1/20/10 → 1/23/10

Keywords

DEP
Micromixer
Particle-manipulating

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/NEMS.2010.5592492

Cite this

Yeh, S. I., Lee, C. J., Fan, Y. J., Liu, C. P., & Sheen, H. J. (2010). Development of an active micromixer by dielectrophrosis particle manipulating. In 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 (pp. 662-665). Article 5592492 (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010). https://doi.org/10.1109/NEMS.2010.5592492

Development of an active micromixer by dielectrophrosis particle manipulating. / Yeh, Szu I.; Lee, Ching Jiun; Fan, Yu Jui et al.
2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010. 2010. p. 662-665 5592492 (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Yeh, SI, Lee, CJ, Fan, YJ, Liu, CP & Sheen, HJ 2010, Development of an active micromixer by dielectrophrosis particle manipulating. in 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010., 5592492, 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, pp. 662-665, 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, 1/20/10. https://doi.org/10.1109/NEMS.2010.5592492

Yeh SI, Lee CJ, Fan YJ, Liu CP, Sheen HJ. Development of an active micromixer by dielectrophrosis particle manipulating. In 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010. 2010. p. 662-665. 5592492. (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010). doi: 10.1109/NEMS.2010.5592492

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title = "Development of an active micromixer by dielectrophrosis particle manipulating",

abstract = "A particle manipulating micromixer was developed successfully in this study. The present device was fabricated by simply MEMS process. Only two photomasks, one for electrode array chip and another for micro-channel, were needed to manufacture the micromixer. Dielectrophoresis (DEP) force was used to manipulate the particles in the micro-channel. In this experience, polymer particles with diameter of 1μm were tested in the fluid with conductivity of 0.10mS/cm. The results show that the symmetrical vortices were observed at frequency of 100 kHz. The traveling wave DEP (twDEP) occurred when the input frequency was 10MHz. Micro-mixer chip which can stir fluid to achieve mixing was fabricated successfully by combining an electro array chip and Y-type micro-channel. The mixing performance depends on the voltage input. The flow phenomena were obtained and analyzed by micro-PIV technology. In the future, different cells can be manipulated by the present micromixer to achieve the rapid mixing with different driving frequency. It is useful in the biological or biomedical application.",

keywords = "DEP, Micromixer, Particle-manipulating",

author = "Yeh, {Szu I.} and Lee, {Ching Jiun} and Fan, {Yu Jui} and Liu, {Cheng Peng} and Sheen, {Horn Jiunn}",

year = "2010",

doi = "10.1109/NEMS.2010.5592492",

language = "English",

isbn = "9781424465439",

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PY - 2010

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AB - A particle manipulating micromixer was developed successfully in this study. The present device was fabricated by simply MEMS process. Only two photomasks, one for electrode array chip and another for micro-channel, were needed to manufacture the micromixer. Dielectrophoresis (DEP) force was used to manipulate the particles in the micro-channel. In this experience, polymer particles with diameter of 1μm were tested in the fluid with conductivity of 0.10mS/cm. The results show that the symmetrical vortices were observed at frequency of 100 kHz. The traveling wave DEP (twDEP) occurred when the input frequency was 10MHz. Micro-mixer chip which can stir fluid to achieve mixing was fabricated successfully by combining an electro array chip and Y-type micro-channel. The mixing performance depends on the voltage input. The flow phenomena were obtained and analyzed by micro-PIV technology. In the future, different cells can be manipulated by the present micromixer to achieve the rapid mixing with different driving frequency. It is useful in the biological or biomedical application.

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Development of an active micromixer by dielectrophrosis particle manipulating

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Keywords

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