Co-printing of micro/nanostructures integrated with preconcentration to enhance protein detection

Yi Jung Lu, Han Yun Hsieh, Wen Fai Yang, Kuang Chong Wu, Hidetoshi Tahara, Pei Kuen Wei, Horn Jiunn Sheen, Yu Jui Fan

Research output: Contribution to journalArticlepeer-review


This paper reports a fabrication method that can make microstructures such as microfluidic channels and nanostructures to generate surface plasmon resonance (SPR) signals in one-step using hot embossing. We first made a micro/nanostructural mold on a silicon substrate through sequential e-beam lithography, reactive ion etching (RIE), photolithography, and inductively coupled plasma RIE. The fabricated mold and cyclo-olefin polymer (COP) film were pressed between two flat, heated metal bases under optimal conditions, and the micro/nanostructures were complementarily transferred to the COP film. After depositing a thin aluminum film onto the nanostructure, the device was completed by patterning Nafion that crossed two channels and a nearby nanostructure, and by bonding the COP film to a flat polydimethylsiloxane (PDMS) substrate with holes punched for the inlets and outlets. SPR signals of the nanostructures of the microfluidic channel were calibrated using glycerol solutions of different percentages, and a wavelength sensitivity of 393 nm/refractive index unit was found for the Al-based nanoslit SPR sensing chip. To detect macromolecules, we first modified bovine serum albumin (BSA) onto the surface of the SPR chip and then allowed different concentrations of anti-BSA samples to flow into the device. A calibration curve for detecting anti-BSA was constructed, and anti-BSA detection levels with and without preconcentration were compared.

Original languageEnglish
Article number3
JournalMicrofluidics and Nanofluidics
Issue number1
Publication statusPublished - Jan 2024


  • Biosensor
  • Hot embossing
  • Ion concentration polarization
  • Localized surface plasmon resonance (LSPR)
  • Microfluidics

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Materials Chemistry


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