Atomic layer deposited Al2O3 films on NiTi shape memory alloys for biomedical applications

Hsin Chih Lin, Yen Lun Chang, Yin Yi Han, Kai Chang Yang, Minn Chang Chen

Research output: Contribution to journalConference articlepeer-review

13 Citations (Scopus)


NiTi shape memory alloys (SMAs) have been widely applied in biomedical fields owing to their excellent shape memory effect, super-elasticity, biomedical properties and fatigue performance. These applications include the cardiovascular stent, guidewire, stone extractors used in the cystic duct, artificial heart valve and orthodontic wire, etc. However, NiTi alloys might release out the Ni atoms in the physiological environment, which will induce the serious problems of allergic reaction, poisoning and causing cancer. This study employs the atomic layer deposition (ALD) technique to deposit Al2O3 films on the surfaces of NiTi SMAs. Experimental results show that the chemical compositions of ALD-Al2O3 films are well homogeneous. The ALD-Al2O3 films exhibit a fair adhesion with the NiTi substrates and sustain a suitable deformation strain. The ALD-Al2O3 films can also effectively inhibit the release out of Ni atoms from the NiTi SMAs. Meanwhile, the corrosion resistance of NiTi SMAs can be improved by the ALD-Al2O3 films.

Original languageEnglish
Pages (from-to)431-437
Number of pages7
JournalProcedia Manufacturing
Publication statusPublished - Jan 1 2019
Event9th International Conference on Physical and Numerical Simulation of Materials Processing, ICPNS 2019 - Moscow, Russian Federation
Duration: Oct 10 2019Oct 15 2019


  • Al2O3
  • Atomic Layer Deposition
  • Ni Release
  • NiTi Shape Memory Alloys

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Artificial Intelligence


Dive into the research topics of 'Atomic layer deposited Al2O3 films on NiTi shape memory alloys for biomedical applications'. Together they form a unique fingerprint.

Cite this