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Application of Aluminum Nitride Thin Film on Biosensing of Cell Differentiation
Keng Liang Ou
, Chang Chih Chen
, Che Tong Lin
, Chin Sung Chen
, Chia Cheng Lin
,
Sheng Yang Lee
Research output
:
Contribution to journal
›
Article
›
peer-review
6
Citations (Scopus)
Overview
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Engineering
Thin Films
100%
Nitride
100%
Biosensing
100%
Metal-Insulator-Metal
100%
Microvoids
60%
Face-Centered Cubic
40%
Transmissions
20%
Ray Diffraction
20%
Biocompatibility Test
20%
Wireless Technologies
20%
Induced Stress
20%
Breakdown Voltage
20%
Reactive Sputtering
20%
Film Property
20%
Material Science
Film
100%
Thin Films
100%
Aluminum Nitride
100%
Capacitor
66%
X-Ray Diffraction
11%
Density
11%
Transmission Electron Microscopy
11%
Biocompatibility
11%
Electron Microscopy
11%
Electrical Resistivity
11%
Stress Analysis
11%