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Analysis for replication and surface roughness of micro-feature of silicon mold insert by UV-LIGA method
- Chiung Fang Huang
- , Jeol Long Lee
- , Yung Kang Shen
- , Chi Wei Wu
- , Yi Lin
- , Sung Chih Hsu
- , Ming Wei Wu
- , Chung Yu Kao
Research output: Contribution to journal › Article › peer-review