Analysis for replication and surface roughness of micro-feature of silicon mold insert by UV-LIGA method

Chiung Fang Huang; Jeol Long Lee; Yung Kang Shen; Chi Wei Wu; Yi Lin; Sung Chih Hsu; Ming Wei Wu; Chung Yu Kao

Analysis for replication and surface roughness of micro-feature of silicon mold insert by UV-LIGA method

Chiung Fang Huang, Jeol Long Lee, Yung Kang Shen, Chi Wei Wu, Yi Lin, Sung Chih Hsu, Ming Wei Wu, Chung Yu Kao

Research output: Contribution to journal › Article › peer-review

Abstract

This study demonstrates the replication property and surface roughness for metal micro-mold that combines the replica molding (REM) and electroforming techniques. The micro-mold firstly uses the silicon wafer to fabricate the master mold by UV-LIGA method, and then uses the sputtering method to sputter the Ni element as the seed layer on the surface of master mold. The electroforming method manufactures the Ni mold insert from the master mold with seed layer. Finally, this study uses the PDMS material to replicate the micro-feature from the Ni mold insert by replica molding. This study indicates the replication property and surface roughness of different micro-feature shapes and sizes (concave and convex) for Ni mold insert and molded PDMS.

Original language	English
Pages (from-to)	443-446
Number of pages	4
Journal	Advanced Materials Research
Volume	47-50 PART 1
Publication status	Published - 2008
Event	Multi-functional Materials and Structures - International Conference on Multifunctional Materials and Structures - Hong Kong, P.R., China Duration: Jul 28 2008 → Jul 31 2008

Keywords

Electroforming
Micro-feature
Replication
Surface roughness
UV-LIGA

ASJC Scopus subject areas

General Engineering

Cite this

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title = "Analysis for replication and surface roughness of micro-feature of silicon mold insert by UV-LIGA method",

abstract = "This study demonstrates the replication property and surface roughness for metal micro-mold that combines the replica molding (REM) and electroforming techniques. The micro-mold firstly uses the silicon wafer to fabricate the master mold by UV-LIGA method, and then uses the sputtering method to sputter the Ni element as the seed layer on the surface of master mold. The electroforming method manufactures the Ni mold insert from the master mold with seed layer. Finally, this study uses the PDMS material to replicate the micro-feature from the Ni mold insert by replica molding. This study indicates the replication property and surface roughness of different micro-feature shapes and sizes (concave and convex) for Ni mold insert and molded PDMS.",

keywords = "Electroforming, Micro-feature, Replication, Surface roughness, UV-LIGA",

author = "Huang, {Chiung Fang} and Lee, {Jeol Long} and Shen, {Yung Kang} and Wu, {Chi Wei} and Yi Lin and Hsu, {Sung Chih} and Wu, {Ming Wei} and Kao, {Chung Yu}",

year = "2008",

language = "English",

volume = "47-50 PART 1",

pages = "443--446",

journal = "Advanced Materials Research",

issn = "1662-8985",

publisher = "Trans Tech Publications",

note = "Multi-functional Materials and Structures - International Conference on Multifunctional Materials and Structures ; Conference date: 28-07-2008 Through 31-07-2008",

}

TY - JOUR

T1 - Analysis for replication and surface roughness of micro-feature of silicon mold insert by UV-LIGA method

AU - Huang, Chiung Fang

AU - Lee, Jeol Long

AU - Shen, Yung Kang

AU - Wu, Chi Wei

AU - Lin, Yi

AU - Hsu, Sung Chih

AU - Wu, Ming Wei

AU - Kao, Chung Yu

PY - 2008

Y1 - 2008

N2 - This study demonstrates the replication property and surface roughness for metal micro-mold that combines the replica molding (REM) and electroforming techniques. The micro-mold firstly uses the silicon wafer to fabricate the master mold by UV-LIGA method, and then uses the sputtering method to sputter the Ni element as the seed layer on the surface of master mold. The electroforming method manufactures the Ni mold insert from the master mold with seed layer. Finally, this study uses the PDMS material to replicate the micro-feature from the Ni mold insert by replica molding. This study indicates the replication property and surface roughness of different micro-feature shapes and sizes (concave and convex) for Ni mold insert and molded PDMS.

AB - This study demonstrates the replication property and surface roughness for metal micro-mold that combines the replica molding (REM) and electroforming techniques. The micro-mold firstly uses the silicon wafer to fabricate the master mold by UV-LIGA method, and then uses the sputtering method to sputter the Ni element as the seed layer on the surface of master mold. The electroforming method manufactures the Ni mold insert from the master mold with seed layer. Finally, this study uses the PDMS material to replicate the micro-feature from the Ni mold insert by replica molding. This study indicates the replication property and surface roughness of different micro-feature shapes and sizes (concave and convex) for Ni mold insert and molded PDMS.

KW - Electroforming

KW - Micro-feature

KW - Replication

KW - Surface roughness

KW - UV-LIGA

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M3 - Article

AN - SCOPUS:56349138545

SN - 1662-8985

VL - 47-50 PART 1

SP - 443

EP - 446

JO - Advanced Materials Research

JF - Advanced Materials Research

T2 - Multi-functional Materials and Structures - International Conference on Multifunctional Materials and Structures

Y2 - 28 July 2008 through 31 July 2008

ER -

Analysis for replication and surface roughness of micro-feature of silicon mold insert by UV-LIGA method

Abstract

Keywords

ASJC Scopus subject areas

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