A novel fabrication method for mold insert of injection molded microlens array

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

This paper reports a simple and novel procedure for mold insert of microlens array. The micro injection molding (MIM) and micro injection-compression molding (MICM) are used to replicate the microlens array. The 200*200 arrays of molded microlens, with a diameter of 150 μm, a pitch of 200 μm and a sag height of 11.236 μm have been successfully fabricated. The average surface roughness of the Ni mold insert is 6.916 nm. The average surface roughness of the molded microlens array is 4.608 nm for MIM and 4.555 nm for MICM. The complete fabrication process of mold insert is executed at room temperature and low pressure for this paper.

Original languageEnglish
Title of host publicationAdvances in Materials Manufacturing Science and Technology II - Selected Papers from the 12th International Manufacturing Conference in China
EditorsChengyu Jiang, Geng Liu, Dinghua Zhang, Xipeng Xu
PublisherTrans Tech Publications Ltd
Pages665-668
Number of pages4
ISBN (Print)0878494219, 9780878494217
DOIs
Publication statusPublished - 2006
Externally publishedYes
Event12th International Manufacturing Conference in China, IMCC2006 - Xi'an, China
Duration: Sept 21 2006Sept 23 2006

Publication series

NameMaterials Science Forum
Volume532-533
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752

Other

Other12th International Manufacturing Conference in China, IMCC2006
Country/TerritoryChina
CityXi'an
Period9/21/069/23/06

Keywords

  • Electroforming
  • Microlens array
  • Room-temperature imprint lithography
  • Surface roughness

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering
  • General Materials Science

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