A novel fabrication method and optimum tooling design for microlens arrays

Y. K. Shen; C. Y. Chang; Y. S. Shen; S. Y. Yang

A novel fabrication method and optimum tooling design for microlens arrays

Y. K. Shen, C. Y. Chang, Y. S. Shen, S. Y. Yang

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This study uses a simple and novel procedure for microlens arrays. The master is formed by room temperature imprint lithography and thermal reflow process. The electroforming is used to fabricate the metal mold insert from master. Finally, micro-hot embossing is used to replicate microlens arrays.

Original language	English
Title of host publication	Annual Technical Conference - ANTEC, Conference Proceedings
Pages	2571-2575
Number of pages	5
Volume	5
Publication status	Published - 2006
Externally published	Yes
Event	Society of Plastics Engineers Annual Technical Conference 2006, ANTEC 2006 - Charlotte, NC, United States Duration: May 7 2006 → May 11 2006

Other

Other	Society of Plastics Engineers Annual Technical Conference 2006, ANTEC 2006
Country/Territory	United States
City	Charlotte, NC
Period	5/7/06 → 5/11/06

Keywords

Deep reactive ion etching
Electroforming
Imprint lithography
Micro-hot embossing
Microlenses
Replication

ASJC Scopus subject areas

General Engineering

Cite this

@inproceedings{a607387a4a0f499ca66a8d89d6962af4,

title = "A novel fabrication method and optimum tooling design for microlens arrays",

abstract = "This study uses a simple and novel procedure for microlens arrays. The master is formed by room temperature imprint lithography and thermal reflow process. The electroforming is used to fabricate the metal mold insert from master. Finally, micro-hot embossing is used to replicate microlens arrays.",

keywords = "Deep reactive ion etching, Electroforming, Imprint lithography, Micro-hot embossing, Microlenses, Replication",

author = "Shen, {Y. K.} and Chang, {C. Y.} and Shen, {Y. S.} and Yang, {S. Y.}",

year = "2006",

language = "English",

volume = "5",

pages = "2571--2575",

booktitle = "Annual Technical Conference - ANTEC, Conference Proceedings",

note = "Society of Plastics Engineers Annual Technical Conference 2006, ANTEC 2006 ; Conference date: 07-05-2006 Through 11-05-2006",

}

TY - GEN

T1 - A novel fabrication method and optimum tooling design for microlens arrays

AU - Shen, Y. K.

AU - Chang, C. Y.

AU - Shen, Y. S.

AU - Yang, S. Y.

PY - 2006

Y1 - 2006

N2 - This study uses a simple and novel procedure for microlens arrays. The master is formed by room temperature imprint lithography and thermal reflow process. The electroforming is used to fabricate the metal mold insert from master. Finally, micro-hot embossing is used to replicate microlens arrays.

AB - This study uses a simple and novel procedure for microlens arrays. The master is formed by room temperature imprint lithography and thermal reflow process. The electroforming is used to fabricate the metal mold insert from master. Finally, micro-hot embossing is used to replicate microlens arrays.

KW - Deep reactive ion etching

KW - Electroforming

KW - Imprint lithography

KW - Micro-hot embossing

KW - Microlenses

KW - Replication

UR - http://www.scopus.com/inward/record.url?scp=33745628077&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33745628077&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:33745628077

VL - 5

SP - 2571

EP - 2575

BT - Annual Technical Conference - ANTEC, Conference Proceedings

T2 - Society of Plastics Engineers Annual Technical Conference 2006, ANTEC 2006

Y2 - 7 May 2006 through 11 May 2006

ER -

A novel fabrication method and optimum tooling design for microlens arrays

Abstract

Other

Keywords

ASJC Scopus subject areas

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