A novel and rapid fabrication for microlens arrays using microinjection molding

This work reports a novel and effective procedure for manufacturing the mold insert of microlens arrays. First, the microlens arrays master is formed using room-temperature imprint lithography and photoresist reflow process. Next, electroforming is carried out to fabriccate the metal mold insert from the master. Finally, microinjection molding is used to replicate the molded microlens arrays. The 200 Ã - 200 arrays of molded microlens, with a diameter of 150 Îm, a pitch of 200 Îm, and a sag height of 11.29 Îm for polycarbonate (PC) material and 11.24 Îm for polymethylmethacrylate (PMMA) material have been successfully fabricated. The moldability for PMMA material is better than PC material on molded microlens arrays. The average surface roughness of the molded microlens arrays is 4.53 nm for PMMA material and 4.81 nm for PC material. The mold temperature is the most important processing factor for the focal length and sag height of molded microlens arrays.