A linear-response CMOS-MEMS capacitive tactile sensor

C. T. Sun; Y. C. Lin; C. J. Hsieh; J. C. Liou; L. B. Wang; W. C. Tian

doi:10.1109/ICSENS.2012.6411545

A linear-response CMOS-MEMS capacitive tactile sensor

C. T. Sun, Y. C. Lin, C. J. Hsieh, J. C. Liou, L. B. Wang, W. C. Tian

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

A linear-response capacitive tactile sensor is presented in this work. The sensor was fabricated by the TSMC 0.35 μ m CMOS process and our self-developed MEMS post-process. The structure of the sensor consisted of one pair of parallel electrodes, with the central part of the membrane electrode hollowed out. A pillar with four beams at each side was set at the center to support the membrane electrode. This structure enhanced the uniformity of the deflection, and thus improved the linearity of the response. The wider dynamic range was also obtained because of the stiffer structure. In addition, the buckling of the membrane was lessened. The performance of this design was compared with the conventional parallel plate one. The measured linearity was 0.9728, and the dynamic range was 400mmHg, with the relieved buckling of 0.22 μm.

Original language	English
Title of host publication	IEEE SENSORS 2012 - Proceedings
DOIs	https://doi.org/10.1109/ICSENS.2012.6411545
Publication status	Published - 2012
Externally published	Yes
Event	11th IEEE SENSORS 2012 Conference - Taipei, Taiwan Duration: Oct 28 2012 → Oct 31 2012

Publication series

Name	Proceedings of IEEE Sensors

Conference

Conference	11th IEEE SENSORS 2012 Conference
Country/Territory	Taiwan
City	Taipei
Period	10/28/12 → 10/31/12

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1109/ICSENS.2012.6411545

Cite this

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title = "A linear-response CMOS-MEMS capacitive tactile sensor",

abstract = "A linear-response capacitive tactile sensor is presented in this work. The sensor was fabricated by the TSMC 0.35 μ m CMOS process and our self-developed MEMS post-process. The structure of the sensor consisted of one pair of parallel electrodes, with the central part of the membrane electrode hollowed out. A pillar with four beams at each side was set at the center to support the membrane electrode. This structure enhanced the uniformity of the deflection, and thus improved the linearity of the response. The wider dynamic range was also obtained because of the stiffer structure. In addition, the buckling of the membrane was lessened. The performance of this design was compared with the conventional parallel plate one. The measured linearity was 0.9728, and the dynamic range was 400mmHg, with the relieved buckling of 0.22 μm.",

author = "Sun, {C. T.} and Lin, {Y. C.} and Hsieh, {C. J.} and Liou, {J. C.} and Wang, {L. B.} and Tian, {W. C.}",

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language = "English",

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AU - Sun, C. T.

AU - Lin, Y. C.

AU - Hsieh, C. J.

AU - Liou, J. C.

AU - Wang, L. B.

AU - Tian, W. C.

PY - 2012

Y1 - 2012

N2 - A linear-response capacitive tactile sensor is presented in this work. The sensor was fabricated by the TSMC 0.35 μ m CMOS process and our self-developed MEMS post-process. The structure of the sensor consisted of one pair of parallel electrodes, with the central part of the membrane electrode hollowed out. A pillar with four beams at each side was set at the center to support the membrane electrode. This structure enhanced the uniformity of the deflection, and thus improved the linearity of the response. The wider dynamic range was also obtained because of the stiffer structure. In addition, the buckling of the membrane was lessened. The performance of this design was compared with the conventional parallel plate one. The measured linearity was 0.9728, and the dynamic range was 400mmHg, with the relieved buckling of 0.22 μm.

AB - A linear-response capacitive tactile sensor is presented in this work. The sensor was fabricated by the TSMC 0.35 μ m CMOS process and our self-developed MEMS post-process. The structure of the sensor consisted of one pair of parallel electrodes, with the central part of the membrane electrode hollowed out. A pillar with four beams at each side was set at the center to support the membrane electrode. This structure enhanced the uniformity of the deflection, and thus improved the linearity of the response. The wider dynamic range was also obtained because of the stiffer structure. In addition, the buckling of the membrane was lessened. The performance of this design was compared with the conventional parallel plate one. The measured linearity was 0.9728, and the dynamic range was 400mmHg, with the relieved buckling of 0.22 μm.

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A linear-response CMOS-MEMS capacitive tactile sensor

Abstract

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Conference

ASJC Scopus subject areas

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